Evacuate
Evacuate
Pressure Control
Automatic
0
mbar
mbar
bar
hPa
Torr
Ventilation
Coolant
Pump Power
Pressure Setpoint
Function Definition
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
time
pressure
coolant
×
Modal header
Function point
repeat
Time(sec):
Pressure:
Coolant(on/of):